Fortran modules which calculate sputtering yields (including both energy and angular dependence) based on [W. Eckstein, "Sputtering Yields", Top. Appl. Phys., vol. 110 (2007) p. 33] . Also old model and data from [Eckstein-Roth-Bohdansky IPP 9/82, FEB. 1993] are included. Those latter were the standard model of the EIRENE code . The models are described here. The library also includes bindings for C, Matlab and Octave.

Authors

Markus Brenneis Marku.nosp@m.s.Br.nosp@m.ennei.nosp@m.s@un.nosp@m.i-due.nosp@m.ssel.nosp@m.dorf..nosp@m.de, Vladislav Kotov v.kot.nosp@m.ov@f.nosp@m.z-jue.nosp@m.lich.nosp@m..de (contact person)