ESPUTR
calculation of sputtering yields
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Calculation of sputtering yields for 2001-model, see description. More...
Go to the source code of this file.
Modules | |
module | esputr2001 |
Functions/Subroutines | |
subroutine, public | esputr2001::esputr2001_init (fileNName, fileThName, err) |
Initialization of the 2001-model. More... | |
subroutine, public | esputr2001::esputr2001_initn (fileNName, err) |
subroutine, public | esputr2001::esputr2001_initth (fileTHName, err) |
subroutine, public | esputr2001::esputr2001_check (res, err) |
Check integrity and validity of data in the module. More... | |
logical function, public | esputr2001::esputr2001_if_initialized () |
Return .true. if module esputr2001 is initialized. More... | |
subroutine, public | esputr2001::esputr2001_deallocate (err) |
Deallocate dynamic arrays used by this module. More... | |
integer function, public | esputr2001::esputr2001_getprojectiletargetidn (proj, targ, err) |
Return ID for a projectile-target combination for 2001-model for normal incidence. More... | |
subroutine, public | esputr2001::esputr2001_getprojectiletargetidsth (proj, targ, thLower, thUpper, err) |
Return two IDs for a projectile-target combination for 2001-model for angular dependence. More... | |
real(esputr_dp) function, public | esputr2001::esputr2001_yn (E0, projectileTarget_id, err) |
Calculate sputtering yield for normal incidence with 2001-model for given incident energy and target-projectile combination. More... | |
real(esputr_dp) function, public | esputr2001::esputr2001_yth (E0, theta, projTargStartId, projTargEndId, err) |
Angular dependence of sputtering yield in 2001-model for given incident angle and energy, projectile-target combination. More... | |
real(esputr_dp) function, public | esputr2001::esputr2001_eth (projectileTarget_id, err) |
Return the threshold energy E_th for the given projectile-target combination. More... | |
subroutine, public | esputr2001::esputr2001_availablecombinationsn (combinations, err) |
Return the list of available projectile-target combinations for normal incidence. More... | |
subroutine, public | esputr2001::esputr2001_availablecombinationsth (combinations, err) |
Return the list of available projectile-target combinations for angular dependence. More... | |
subroutine, public | esputr2001::esputr2001_getavailableenergyrange (projTargStartId, projTargEndId, Emin, Emax, err) |
Get the minimum and maximum energies for which the angular dependency factor is defined. More... | |
Variables | |
logical, save, public | esputr2001::esputr2001_extrapolate_angular =.FALSE. |
Switch for extrapolation of the angular dependency to energies for which no data are defined. More... | |
integer, parameter, public | esputr2001::esputr2001_max_name_length = 16 |
Maximum length of the names of (chemical) elements. More... | |
integer, parameter, private | esputr2001::nconstants_n = 5 |
Number of parameters read from the input file for 2001-model for normal incidence (for one target/projectile combination) More... | |
integer, parameter, private | esputr2001::nconstants_th = 6 |
Number of parameters read from the input file for 2001-model for angular dependence (for one target/projectile combination) More... | |
integer, save, private | esputr2001::ncombinations_n |
Number of entries loaded for 2001-model for normal incidence. More... | |
integer, save, private | esputr2001::ncombinations_th |
Number of entries loaded for 2001-model for angular dependence. More... | |
real(esputr_dp), dimension(:,:), allocatable, save, private | esputr2001::fitvalues_n |
Array with parameters of fitting formula for normal incidence for 2001-model. More... | |
real(esputr_dp), dimension(:,:), allocatable, save, private | esputr2001::fitvalues_th |
Array with parameters read for angular dependence for 2001-model. More... | |
character(esputr2001_max_name_length), dimension(:,:), allocatable, save, private | esputr2001::projectiles_targets_names_n |
Array of strings which contains the names of the target-projectile combinations defined for 2001-model (for normal incidence) More... | |
character(esputr2001_max_name_length), dimension(:,:), allocatable, save, private | esputr2001::projectiles_targets_names_th |
Array of strings which contains the names of the target-projectile combinations defined for 2001-model for the angular dependence. More... | |
integer, save, private | esputr2001::nprojectilestargetsth = 0 |
Number of projectile-target combinations loaded for angular dependence. More... | |
Calculation of sputtering yields for 2001-model, see description.
Definition in file esputr2001.f90.