1 & e + SiH_3^+ & -> & SiH_2 + H & 4.84 & 0.40 & SiH_2 (a; A; B) 2 & & -> & SiH + H_2 & 6.20 & 0.15 & SiH (A) 3 & & -> & SiH + 2H & 1.67 & 0.15 & SiH (A) 4 & & -> & Si+H+ H_2 & 3.17 & 0.30 & Si (^1D;^1S) 5 & e + SiH_2^+ & -> & SiH+ H & 5.74 & 0.25 & SiH (A) 6 & & -> & Si+ H_2 & 7.24 & 0.15 & Si (^1D; ^1S; ^3P_0^0) 7 & & -> & Si+ 2H & 2.71 & 0.60 & Si (^1D; ^1S) 8 & e + SiH^+ & -> & Si+ H & 4.87 & 1.00 & Si (^1D; ^1S; ^3P^0_0)